2/12/2011	7:45:03 AM	Recipe started at 7:45 AM
2/12/2011	7:45:03 AM	Helium valve closed
2/12/2011	7:45:03 AM	BCl3 valve closed
2/12/2011	7:45:03 AM	PH3 valve closed
2/12/2011	7:45:03 AM	SiCl4 pre valve closed
2/12/2011	7:45:03 AM	SiCl4 post valve closed
2/12/2011	7:45:03 AM	Main Vac valve closed
2/12/2011	7:45:03 AM	Bypass valve closed
2/12/2011	7:45:03 AM	Bubbler valve closed
2/12/2011	7:45:03 AM	H2 valve opened
2/12/2011	7:45:03 AM	Helium MFC set to  0.000000
2/12/2011	7:45:03 AM	H2 MFC set to  500.000000
2/12/2011	7:45:03 AM	BCl3 MFC set to  0.000000
2/12/2011	7:45:03 AM	PHl3 MFC set to  0.000000
2/12/2011	7:45:03 AM	SiCl4 MFC set to  0.000000
2/12/2011	7:45:03 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	7:45:03 AM	Tube furnace set to 0
2/12/2011	7:46:29 AM	Helium valve closed
2/12/2011	7:46:29 AM	BCl3 valve closed
2/12/2011	7:46:29 AM	PH3 valve closed
2/12/2011	7:46:29 AM	SiCl4 pre valve closed
2/12/2011	7:46:29 AM	SiCl4 post valve closed
2/12/2011	7:46:29 AM	Main Vac valve closed
2/12/2011	7:46:29 AM	Bypass valve closed
2/12/2011	7:46:29 AM	H2 valve opened
2/12/2011	7:46:29 AM	Bubbler valve opened
2/12/2011	7:46:29 AM	Helium MFC set to  0.000000
2/12/2011	7:46:29 AM	H2 MFC set to  500.000000
2/12/2011	7:46:29 AM	BCl3 MFC set to  0.000000
2/12/2011	7:46:29 AM	PHl3 MFC set to  0.000000
2/12/2011	7:46:29 AM	SiCl4 MFC set to  0.000000
2/12/2011	7:46:29 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	7:46:29 AM	Tube furnace set to 1000
2/12/2011	8:01:29 AM	Helium valve closed
2/12/2011	8:01:29 AM	BCl3 valve closed
2/12/2011	8:01:29 AM	PH3 valve closed
2/12/2011	8:01:29 AM	Main Vac valve closed
2/12/2011	8:01:29 AM	Bypass valve closed
2/12/2011	8:01:29 AM	H2 valve opened
2/12/2011	8:01:29 AM	SiCl4 pre valve opened
2/12/2011	8:01:29 AM	SiCl4 post valve opened
2/12/2011	8:01:29 AM	Bubbler valve opened
2/12/2011	8:01:29 AM	Helium MFC set to  0.000000
2/12/2011	8:01:29 AM	H2 MFC set to  500.000000
2/12/2011	8:01:29 AM	BCl3 MFC set to  0.000000
2/12/2011	8:01:29 AM	PHl3 MFC set to  0.000000
2/12/2011	8:01:29 AM	SiCl4 MFC set to  50.000000
2/12/2011	8:01:29 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	8:01:29 AM	Tube furnace set to 1000
2/12/2011	10:01:29 AM	H2 valve closed
2/12/2011	10:01:29 AM	BCl3 valve closed
2/12/2011	10:01:29 AM	PH3 valve closed
2/12/2011	10:01:29 AM	SiCl4 pre valve closed
2/12/2011	10:01:29 AM	SiCl4 post valve closed
2/12/2011	10:01:29 AM	Main Vac valve closed
2/12/2011	10:01:29 AM	Bypass valve closed
2/12/2011	10:01:29 AM	Helium valve opened
2/12/2011	10:01:29 AM	Bubbler valve opened
2/12/2011	10:01:29 AM	Helium MFC set to  500.000000
2/12/2011	10:01:29 AM	H2 MFC set to  0.000000
2/12/2011	10:01:29 AM	BCl3 MFC set to  0.000000
2/12/2011	10:01:29 AM	PHl3 MFC set to  0.000000
2/12/2011	10:01:29 AM	SiCl4 MFC set to  0.000000
2/12/2011	10:01:29 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	10:01:29 AM	Tube furnace set to 0
2/12/2011	10:21:29 AM	Helium valve closed
2/12/2011	10:21:29 AM	H2 valve closed
2/12/2011	10:21:29 AM	BCl3 valve closed
2/12/2011	10:21:29 AM	PH3 valve closed
2/12/2011	10:21:29 AM	SiCl4 pre valve closed
2/12/2011	10:21:29 AM	SiCl4 post valve closed
2/12/2011	10:21:29 AM	Main Vac valve closed
2/12/2011	10:21:29 AM	Bypass valve closed
2/12/2011	10:21:29 AM	Bubbler valve closed
2/12/2011	10:21:29 AM	Helium MFC set to  0.000000
2/12/2011	10:21:29 AM	H2 MFC set to  0.000000
2/12/2011	10:21:29 AM	BCl3 MFC set to  0.000000
2/12/2011	10:21:29 AM	PHl3 MFC set to  0.000000
2/12/2011	10:21:29 AM	SiCl4 MFC set to  0.000000
2/12/2011	10:21:29 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	10:21:29 AM	Tube furnace set to 0
2/12/2011	10:21:30 AM	Run finished at 10:21 AM
2/12/2011	11:09:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2011	11:09:20 AM	Recipe started at 11:09 AM
2/12/2011	11:09:20 AM	Helium valve closed
2/12/2011	11:09:20 AM	H2 valve closed
2/12/2011	11:09:20 AM	BCl3 valve closed
2/12/2011	11:09:20 AM	PH3 valve closed
2/12/2011	11:09:20 AM	SiCl4 pre valve closed
2/12/2011	11:09:20 AM	SiCl4 post valve closed
2/12/2011	11:09:20 AM	Main Vac valve closed
2/12/2011	11:09:20 AM	Bubbler valve closed
2/12/2011	11:09:20 AM	Bypass valve opened
2/12/2011	11:09:20 AM	Helium MFC set to  0.000000
2/12/2011	11:09:20 AM	H2 MFC set to  0.000000
2/12/2011	11:09:20 AM	BCl3 MFC set to  0.000000
2/12/2011	11:09:20 AM	PHl3 MFC set to  0.000000
2/12/2011	11:09:20 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:09:20 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:09:20 AM	Tube furnace set to 0
2/12/2011	11:09:52 AM	Helium valve closed
2/12/2011	11:09:52 AM	H2 valve closed
2/12/2011	11:09:52 AM	BCl3 valve closed
2/12/2011	11:09:52 AM	PH3 valve closed
2/12/2011	11:09:52 AM	SiCl4 pre valve closed
2/12/2011	11:09:52 AM	SiCl4 post valve closed
2/12/2011	11:09:52 AM	Bubbler valve closed
2/12/2011	11:09:52 AM	Main Vac valve opened
2/12/2011	11:09:52 AM	Bypass valve opened
2/12/2011	11:09:52 AM	Helium MFC set to  0.000000
2/12/2011	11:09:52 AM	H2 MFC set to  0.000000
2/12/2011	11:09:52 AM	BCl3 MFC set to  0.000000
2/12/2011	11:09:52 AM	PHl3 MFC set to  0.000000
2/12/2011	11:09:52 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:09:52 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:09:52 AM	Tube furnace set to 0
2/12/2011	11:09:53 AM	Run finished at 11:09 AM
2/12/2011	11:09:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2011	11:49:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/12/2011	11:50:03 AM	Recipe started at 11:49 AM
2/12/2011	11:50:03 AM	Helium valve closed
2/12/2011	11:50:03 AM	H2 valve closed
2/12/2011	11:50:03 AM	BCl3 valve closed
2/12/2011	11:50:03 AM	PH3 valve closed
2/12/2011	11:50:03 AM	SiCl4 pre valve closed
2/12/2011	11:50:03 AM	SiCl4 post valve closed
2/12/2011	11:50:03 AM	Main Vac valve closed
2/12/2011	11:50:03 AM	Bubbler valve closed
2/12/2011	11:50:03 AM	Bypass valve opened
2/12/2011	11:50:03 AM	Helium MFC set to  0.000000
2/12/2011	11:50:03 AM	H2 MFC set to  0.000000
2/12/2011	11:50:03 AM	BCl3 MFC set to  0.000000
2/12/2011	11:50:03 AM	PHl3 MFC set to  0.000000
2/12/2011	11:50:03 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:50:03 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:50:03 AM	Tube furnace set to 0
2/12/2011	11:50:04 AM	Helium valve closed
2/12/2011	11:50:04 AM	H2 valve closed
2/12/2011	11:50:04 AM	BCl3 valve closed
2/12/2011	11:50:04 AM	PH3 valve closed
2/12/2011	11:50:04 AM	SiCl4 pre valve closed
2/12/2011	11:50:04 AM	SiCl4 post valve closed
2/12/2011	11:50:04 AM	Bubbler valve closed
2/12/2011	11:50:04 AM	Main Vac valve opened
2/12/2011	11:50:04 AM	Bypass valve opened
2/12/2011	11:50:04 AM	Helium MFC set to  0.000000
2/12/2011	11:50:04 AM	H2 MFC set to  0.000000
2/12/2011	11:50:04 AM	BCl3 MFC set to  0.000000
2/12/2011	11:50:04 AM	PHl3 MFC set to  0.000000
2/12/2011	11:50:04 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:50:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:50:04 AM	Tube furnace set to 0
2/12/2011	11:51:04 AM	H2 valve closed
2/12/2011	11:51:04 AM	BCl3 valve closed
2/12/2011	11:51:04 AM	PH3 valve closed
2/12/2011	11:51:04 AM	SiCl4 pre valve closed
2/12/2011	11:51:04 AM	SiCl4 post valve closed
2/12/2011	11:51:04 AM	Bubbler valve closed
2/12/2011	11:51:04 AM	Helium valve opened
2/12/2011	11:51:04 AM	Main Vac valve opened
2/12/2011	11:51:04 AM	Bypass valve opened
2/12/2011	11:51:04 AM	Helium MFC set to  100.000000
2/12/2011	11:51:04 AM	H2 MFC set to  0.000000
2/12/2011	11:51:04 AM	BCl3 MFC set to  0.000000
2/12/2011	11:51:04 AM	PHl3 MFC set to  0.000000
2/12/2011	11:51:04 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:51:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:51:04 AM	Tube furnace set to 0
2/12/2011	11:52:04 AM	Helium valve closed
2/12/2011	11:52:04 AM	H2 valve closed
2/12/2011	11:52:04 AM	BCl3 valve closed
2/12/2011	11:52:04 AM	PH3 valve closed
2/12/2011	11:52:04 AM	SiCl4 pre valve closed
2/12/2011	11:52:04 AM	SiCl4 post valve closed
2/12/2011	11:52:04 AM	Bubbler valve closed
2/12/2011	11:52:04 AM	Main Vac valve opened
2/12/2011	11:52:04 AM	Bypass valve opened
2/12/2011	11:52:04 AM	Helium MFC set to  0.000000
2/12/2011	11:52:04 AM	H2 MFC set to  0.000000
2/12/2011	11:52:04 AM	BCl3 MFC set to  0.000000
2/12/2011	11:52:04 AM	PHl3 MFC set to  0.000000
2/12/2011	11:52:04 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:52:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:52:04 AM	Tube furnace set to 0
2/12/2011	11:53:04 AM	H2 valve closed
2/12/2011	11:53:04 AM	BCl3 valve closed
2/12/2011	11:53:04 AM	PH3 valve closed
2/12/2011	11:53:04 AM	SiCl4 pre valve closed
2/12/2011	11:53:04 AM	SiCl4 post valve closed
2/12/2011	11:53:04 AM	Bubbler valve closed
2/12/2011	11:53:04 AM	Helium valve opened
2/12/2011	11:53:04 AM	Main Vac valve opened
2/12/2011	11:53:04 AM	Bypass valve opened
2/12/2011	11:53:04 AM	Helium MFC set to  100.000000
2/12/2011	11:53:04 AM	H2 MFC set to  0.000000
2/12/2011	11:53:04 AM	BCl3 MFC set to  0.000000
2/12/2011	11:53:04 AM	PHl3 MFC set to  0.000000
2/12/2011	11:53:04 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:53:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:53:04 AM	Tube furnace set to 0
2/12/2011	11:54:04 AM	Helium valve closed
2/12/2011	11:54:04 AM	H2 valve closed
2/12/2011	11:54:04 AM	BCl3 valve closed
2/12/2011	11:54:04 AM	PH3 valve closed
2/12/2011	11:54:04 AM	SiCl4 pre valve closed
2/12/2011	11:54:04 AM	SiCl4 post valve closed
2/12/2011	11:54:04 AM	Bubbler valve closed
2/12/2011	11:54:04 AM	Main Vac valve opened
2/12/2011	11:54:04 AM	Bypass valve opened
2/12/2011	11:54:04 AM	Helium MFC set to  0.000000
2/12/2011	11:54:04 AM	H2 MFC set to  0.000000
2/12/2011	11:54:04 AM	BCl3 MFC set to  0.000000
2/12/2011	11:54:04 AM	PHl3 MFC set to  0.000000
2/12/2011	11:54:04 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:54:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:54:05 AM	Tube furnace set to 0
2/12/2011	11:55:05 AM	H2 valve closed
2/12/2011	11:55:05 AM	BCl3 valve closed
2/12/2011	11:55:05 AM	PH3 valve closed
2/12/2011	11:55:05 AM	SiCl4 pre valve closed
2/12/2011	11:55:05 AM	SiCl4 post valve closed
2/12/2011	11:55:05 AM	Bubbler valve closed
2/12/2011	11:55:05 AM	Helium valve opened
2/12/2011	11:55:05 AM	Main Vac valve opened
2/12/2011	11:55:05 AM	Bypass valve opened
2/12/2011	11:55:05 AM	Helium MFC set to  100.000000
2/12/2011	11:55:05 AM	H2 MFC set to  0.000000
2/12/2011	11:55:05 AM	BCl3 MFC set to  0.000000
2/12/2011	11:55:05 AM	PHl3 MFC set to  0.000000
2/12/2011	11:55:05 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:55:05 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:55:05 AM	Tube furnace set to 0
2/12/2011	11:56:05 AM	Helium valve closed
2/12/2011	11:56:05 AM	H2 valve closed
2/12/2011	11:56:05 AM	BCl3 valve closed
2/12/2011	11:56:05 AM	PH3 valve closed
2/12/2011	11:56:05 AM	SiCl4 pre valve closed
2/12/2011	11:56:05 AM	SiCl4 post valve closed
2/12/2011	11:56:05 AM	Bubbler valve closed
2/12/2011	11:56:05 AM	Main Vac valve opened
2/12/2011	11:56:05 AM	Bypass valve opened
2/12/2011	11:56:05 AM	Helium MFC set to  0.000000
2/12/2011	11:56:05 AM	H2 MFC set to  0.000000
2/12/2011	11:56:05 AM	BCl3 MFC set to  0.000000
2/12/2011	11:56:05 AM	PHl3 MFC set to  0.000000
2/12/2011	11:56:05 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:56:05 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:56:05 AM	Tube furnace set to 0
2/12/2011	11:57:05 AM	H2 valve closed
2/12/2011	11:57:05 AM	BCl3 valve closed
2/12/2011	11:57:05 AM	PH3 valve closed
2/12/2011	11:57:05 AM	SiCl4 pre valve closed
2/12/2011	11:57:05 AM	SiCl4 post valve closed
2/12/2011	11:57:05 AM	Bubbler valve closed
2/12/2011	11:57:05 AM	Helium valve opened
2/12/2011	11:57:05 AM	Main Vac valve opened
2/12/2011	11:57:05 AM	Bypass valve opened
2/12/2011	11:57:05 AM	Helium MFC set to  100.000000
2/12/2011	11:57:05 AM	H2 MFC set to  0.000000
2/12/2011	11:57:05 AM	BCl3 MFC set to  0.000000
2/12/2011	11:57:05 AM	PHl3 MFC set to  0.000000
2/12/2011	11:57:05 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:57:05 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:57:05 AM	Tube furnace set to 0
2/12/2011	11:58:05 AM	Helium valve closed
2/12/2011	11:58:05 AM	H2 valve closed
2/12/2011	11:58:05 AM	BCl3 valve closed
2/12/2011	11:58:05 AM	PH3 valve closed
2/12/2011	11:58:05 AM	SiCl4 pre valve closed
2/12/2011	11:58:05 AM	SiCl4 post valve closed
2/12/2011	11:58:05 AM	Bubbler valve closed
2/12/2011	11:58:05 AM	Main Vac valve opened
2/12/2011	11:58:05 AM	Bypass valve opened
2/12/2011	11:58:05 AM	Helium MFC set to  0.000000
2/12/2011	11:58:05 AM	H2 MFC set to  0.000000
2/12/2011	11:58:05 AM	BCl3 MFC set to  0.000000
2/12/2011	11:58:05 AM	PHl3 MFC set to  0.000000
2/12/2011	11:58:05 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:58:05 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:58:05 AM	Tube furnace set to 0
2/12/2011	11:59:06 AM	H2 valve closed
2/12/2011	11:59:06 AM	BCl3 valve closed
2/12/2011	11:59:06 AM	PH3 valve closed
2/12/2011	11:59:06 AM	SiCl4 pre valve closed
2/12/2011	11:59:06 AM	SiCl4 post valve closed
2/12/2011	11:59:06 AM	Bubbler valve closed
2/12/2011	11:59:06 AM	Helium valve opened
2/12/2011	11:59:06 AM	Main Vac valve opened
2/12/2011	11:59:06 AM	Bypass valve opened
2/12/2011	11:59:06 AM	Helium MFC set to  100.000000
2/12/2011	11:59:06 AM	H2 MFC set to  0.000000
2/12/2011	11:59:06 AM	BCl3 MFC set to  0.000000
2/12/2011	11:59:06 AM	PHl3 MFC set to  0.000000
2/12/2011	11:59:06 AM	SiCl4 MFC set to  0.000000
2/12/2011	11:59:06 AM	Bypass solenoid MFC set to  0.000000
2/12/2011	11:59:06 AM	Tube furnace set to 0
2/12/2011	12:00:06 PM	Helium valve closed
2/12/2011	12:00:06 PM	H2 valve closed
2/12/2011	12:00:06 PM	BCl3 valve closed
2/12/2011	12:00:06 PM	PH3 valve closed
2/12/2011	12:00:06 PM	SiCl4 pre valve closed
2/12/2011	12:00:06 PM	SiCl4 post valve closed
2/12/2011	12:00:06 PM	Bubbler valve closed
2/12/2011	12:00:06 PM	Main Vac valve opened
2/12/2011	12:00:06 PM	Bypass valve opened
2/12/2011	12:00:06 PM	Helium MFC set to  0.000000
2/12/2011	12:00:06 PM	H2 MFC set to  0.000000
2/12/2011	12:00:06 PM	BCl3 MFC set to  0.000000
2/12/2011	12:00:06 PM	PHl3 MFC set to  0.000000
2/12/2011	12:00:06 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:00:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:00:06 PM	Tube furnace set to 0
2/12/2011	12:01:06 PM	H2 valve closed
2/12/2011	12:01:06 PM	BCl3 valve closed
2/12/2011	12:01:06 PM	PH3 valve closed
2/12/2011	12:01:06 PM	SiCl4 pre valve closed
2/12/2011	12:01:06 PM	SiCl4 post valve closed
2/12/2011	12:01:06 PM	Bubbler valve closed
2/12/2011	12:01:06 PM	Helium valve opened
2/12/2011	12:01:06 PM	Main Vac valve opened
2/12/2011	12:01:06 PM	Bypass valve opened
2/12/2011	12:01:06 PM	Helium MFC set to  100.000000
2/12/2011	12:01:06 PM	H2 MFC set to  0.000000
2/12/2011	12:01:06 PM	BCl3 MFC set to  0.000000
2/12/2011	12:01:06 PM	PHl3 MFC set to  0.000000
2/12/2011	12:01:06 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:01:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:01:06 PM	Tube furnace set to 0
2/12/2011	12:02:06 PM	Helium valve closed
2/12/2011	12:02:06 PM	H2 valve closed
2/12/2011	12:02:06 PM	BCl3 valve closed
2/12/2011	12:02:06 PM	PH3 valve closed
2/12/2011	12:02:06 PM	SiCl4 pre valve closed
2/12/2011	12:02:06 PM	SiCl4 post valve closed
2/12/2011	12:02:06 PM	Bubbler valve closed
2/12/2011	12:02:06 PM	Main Vac valve opened
2/12/2011	12:02:06 PM	Bypass valve opened
2/12/2011	12:02:06 PM	Helium MFC set to  0.000000
2/12/2011	12:02:06 PM	H2 MFC set to  0.000000
2/12/2011	12:02:06 PM	BCl3 MFC set to  0.000000
2/12/2011	12:02:06 PM	PHl3 MFC set to  0.000000
2/12/2011	12:02:06 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:02:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:02:06 PM	Tube furnace set to 0
2/12/2011	12:03:06 PM	H2 valve closed
2/12/2011	12:03:06 PM	BCl3 valve closed
2/12/2011	12:03:06 PM	PH3 valve closed
2/12/2011	12:03:06 PM	SiCl4 pre valve closed
2/12/2011	12:03:06 PM	SiCl4 post valve closed
2/12/2011	12:03:06 PM	Bubbler valve closed
2/12/2011	12:03:06 PM	Helium valve opened
2/12/2011	12:03:06 PM	Main Vac valve opened
2/12/2011	12:03:06 PM	Bypass valve opened
2/12/2011	12:03:06 PM	Helium MFC set to  100.000000
2/12/2011	12:03:06 PM	H2 MFC set to  0.000000
2/12/2011	12:03:06 PM	BCl3 MFC set to  0.000000
2/12/2011	12:03:06 PM	PHl3 MFC set to  0.000000
2/12/2011	12:03:06 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:03:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:03:06 PM	Tube furnace set to 0
2/12/2011	12:04:07 PM	Helium valve closed
2/12/2011	12:04:07 PM	H2 valve closed
2/12/2011	12:04:07 PM	BCl3 valve closed
2/12/2011	12:04:07 PM	PH3 valve closed
2/12/2011	12:04:07 PM	SiCl4 pre valve closed
2/12/2011	12:04:07 PM	SiCl4 post valve closed
2/12/2011	12:04:07 PM	Bubbler valve closed
2/12/2011	12:04:07 PM	Main Vac valve opened
2/12/2011	12:04:07 PM	Bypass valve opened
2/12/2011	12:04:07 PM	Helium MFC set to  0.000000
2/12/2011	12:04:07 PM	H2 MFC set to  0.000000
2/12/2011	12:04:07 PM	BCl3 MFC set to  0.000000
2/12/2011	12:04:07 PM	PHl3 MFC set to  0.000000
2/12/2011	12:04:07 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:04:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:04:07 PM	Tube furnace set to 0
2/12/2011	12:05:07 PM	H2 valve closed
2/12/2011	12:05:07 PM	BCl3 valve closed
2/12/2011	12:05:07 PM	PH3 valve closed
2/12/2011	12:05:07 PM	SiCl4 pre valve closed
2/12/2011	12:05:07 PM	SiCl4 post valve closed
2/12/2011	12:05:07 PM	Bubbler valve closed
2/12/2011	12:05:07 PM	Helium valve opened
2/12/2011	12:05:07 PM	Main Vac valve opened
2/12/2011	12:05:07 PM	Bypass valve opened
2/12/2011	12:05:07 PM	Helium MFC set to  100.000000
2/12/2011	12:05:07 PM	H2 MFC set to  0.000000
2/12/2011	12:05:07 PM	BCl3 MFC set to  0.000000
2/12/2011	12:05:07 PM	PHl3 MFC set to  0.000000
2/12/2011	12:05:07 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:05:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:05:07 PM	Tube furnace set to 0
2/12/2011	12:06:07 PM	Helium valve closed
2/12/2011	12:06:07 PM	H2 valve closed
2/12/2011	12:06:07 PM	BCl3 valve closed
2/12/2011	12:06:07 PM	PH3 valve closed
2/12/2011	12:06:07 PM	SiCl4 pre valve closed
2/12/2011	12:06:07 PM	SiCl4 post valve closed
2/12/2011	12:06:07 PM	Bubbler valve closed
2/12/2011	12:06:07 PM	Main Vac valve opened
2/12/2011	12:06:07 PM	Bypass valve opened
2/12/2011	12:06:07 PM	Helium MFC set to  0.000000
2/12/2011	12:06:07 PM	H2 MFC set to  0.000000
2/12/2011	12:06:07 PM	BCl3 MFC set to  0.000000
2/12/2011	12:06:07 PM	PHl3 MFC set to  0.000000
2/12/2011	12:06:07 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:06:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:06:07 PM	Tube furnace set to 0
2/12/2011	12:07:07 PM	H2 valve closed
2/12/2011	12:07:07 PM	BCl3 valve closed
2/12/2011	12:07:07 PM	PH3 valve closed
2/12/2011	12:07:07 PM	SiCl4 pre valve closed
2/12/2011	12:07:07 PM	SiCl4 post valve closed
2/12/2011	12:07:07 PM	Bubbler valve closed
2/12/2011	12:07:07 PM	Helium valve opened
2/12/2011	12:07:07 PM	Main Vac valve opened
2/12/2011	12:07:07 PM	Bypass valve opened
2/12/2011	12:07:07 PM	Helium MFC set to  100.000000
2/12/2011	12:07:07 PM	H2 MFC set to  0.000000
2/12/2011	12:07:07 PM	BCl3 MFC set to  0.000000
2/12/2011	12:07:07 PM	PHl3 MFC set to  0.000000
2/12/2011	12:07:07 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:07:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:07:07 PM	Tube furnace set to 0
2/12/2011	12:08:07 PM	Helium valve closed
2/12/2011	12:08:07 PM	H2 valve closed
2/12/2011	12:08:07 PM	BCl3 valve closed
2/12/2011	12:08:07 PM	PH3 valve closed
2/12/2011	12:08:07 PM	SiCl4 pre valve closed
2/12/2011	12:08:07 PM	SiCl4 post valve closed
2/12/2011	12:08:07 PM	Bubbler valve closed
2/12/2011	12:08:07 PM	Main Vac valve opened
2/12/2011	12:08:07 PM	Bypass valve opened
2/12/2011	12:08:07 PM	Helium MFC set to  0.000000
2/12/2011	12:08:07 PM	H2 MFC set to  0.000000
2/12/2011	12:08:07 PM	BCl3 MFC set to  0.000000
2/12/2011	12:08:07 PM	PHl3 MFC set to  0.000000
2/12/2011	12:08:07 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:08:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:08:08 PM	Tube furnace set to 0
2/12/2011	12:09:08 PM	H2 valve closed
2/12/2011	12:09:08 PM	BCl3 valve closed
2/12/2011	12:09:08 PM	PH3 valve closed
2/12/2011	12:09:08 PM	SiCl4 pre valve closed
2/12/2011	12:09:08 PM	SiCl4 post valve closed
2/12/2011	12:09:08 PM	Bubbler valve closed
2/12/2011	12:09:08 PM	Helium valve opened
2/12/2011	12:09:08 PM	Main Vac valve opened
2/12/2011	12:09:08 PM	Bypass valve opened
2/12/2011	12:09:08 PM	Helium MFC set to  100.000000
2/12/2011	12:09:08 PM	H2 MFC set to  0.000000
2/12/2011	12:09:08 PM	BCl3 MFC set to  0.000000
2/12/2011	12:09:08 PM	PHl3 MFC set to  0.000000
2/12/2011	12:09:08 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:09:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:09:08 PM	Tube furnace set to 0
2/12/2011	12:10:08 PM	Helium valve closed
2/12/2011	12:10:08 PM	H2 valve closed
2/12/2011	12:10:08 PM	BCl3 valve closed
2/12/2011	12:10:08 PM	PH3 valve closed
2/12/2011	12:10:08 PM	SiCl4 pre valve closed
2/12/2011	12:10:08 PM	SiCl4 post valve closed
2/12/2011	12:10:08 PM	Bubbler valve closed
2/12/2011	12:10:08 PM	Main Vac valve opened
2/12/2011	12:10:08 PM	Bypass valve opened
2/12/2011	12:10:08 PM	Helium MFC set to  0.000000
2/12/2011	12:10:08 PM	H2 MFC set to  0.000000
2/12/2011	12:10:08 PM	BCl3 MFC set to  0.000000
2/12/2011	12:10:08 PM	PHl3 MFC set to  0.000000
2/12/2011	12:10:08 PM	SiCl4 MFC set to  0.000000
2/12/2011	12:10:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	12:10:08 PM	Tube furnace set to 0
2/12/2011	12:10:09 PM	Run finished at 12:10 PM
2/12/2011	12:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/12/2011	4:35:58 PM	Bypass valve closed
2/12/2011	4:35:58 PM	Bypass valve opened
2/12/2011	4:36:02 PM	Recipe started at 4:36 PM
2/12/2011	4:36:02 PM	Helium valve closed
2/12/2011	4:36:02 PM	BCl3 valve closed
2/12/2011	4:36:02 PM	PH3 valve closed
2/12/2011	4:36:02 PM	SiCl4 pre valve closed
2/12/2011	4:36:02 PM	SiCl4 post valve closed
2/12/2011	4:36:02 PM	Main Vac valve closed
2/12/2011	4:36:02 PM	Bypass valve closed
2/12/2011	4:36:02 PM	Bubbler valve closed
2/12/2011	4:36:02 PM	H2 valve opened
2/12/2011	4:36:02 PM	Helium MFC set to  0.000000
2/12/2011	4:36:02 PM	H2 MFC set to  500.000000
2/12/2011	4:36:02 PM	BCl3 MFC set to  0.000000
2/12/2011	4:36:02 PM	PHl3 MFC set to  0.000000
2/12/2011	4:36:02 PM	SiCl4 MFC set to  0.000000
2/12/2011	4:36:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	4:36:02 PM	Tube furnace set to 100
2/12/2011	4:37:25 PM	Helium valve closed
2/12/2011	4:37:25 PM	BCl3 valve closed
2/12/2011	4:37:25 PM	PH3 valve closed
2/12/2011	4:37:25 PM	SiCl4 pre valve closed
2/12/2011	4:37:25 PM	SiCl4 post valve closed
2/12/2011	4:37:25 PM	Main Vac valve closed
2/12/2011	4:37:25 PM	Bypass valve closed
2/12/2011	4:37:25 PM	H2 valve opened
2/12/2011	4:37:25 PM	Bubbler valve opened
2/12/2011	4:37:25 PM	Helium MFC set to  0.000000
2/12/2011	4:37:25 PM	H2 MFC set to  500.000000
2/12/2011	4:37:25 PM	BCl3 MFC set to  0.000000
2/12/2011	4:37:25 PM	PHl3 MFC set to  0.000000
2/12/2011	4:37:25 PM	SiCl4 MFC set to  0.000000
2/12/2011	4:37:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	4:37:25 PM	Tube furnace set to 1000
2/12/2011	4:57:25 PM	Helium valve closed
2/12/2011	4:57:25 PM	PH3 valve closed
2/12/2011	4:57:25 PM	Main Vac valve closed
2/12/2011	4:57:25 PM	Bypass valve closed
2/12/2011	4:57:25 PM	H2 valve opened
2/12/2011	4:57:25 PM	BCl3 valve opened
2/12/2011	4:57:25 PM	SiCl4 pre valve opened
2/12/2011	4:57:25 PM	SiCl4 post valve opened
2/12/2011	4:57:25 PM	Bubbler valve opened
2/12/2011	4:57:25 PM	Helium MFC set to  0.000000
2/12/2011	4:57:25 PM	H2 MFC set to  500.000000
2/12/2011	4:57:25 PM	BCl3 MFC set to  10.000000
2/12/2011	4:57:25 PM	PHl3 MFC set to  0.000000
2/12/2011	4:57:25 PM	SiCl4 MFC set to  50.000000
2/12/2011	4:57:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	4:57:25 PM	Tube furnace set to 1000
2/12/2011	5:17:25 PM	H2 valve closed
2/12/2011	5:17:25 PM	BCl3 valve closed
2/12/2011	5:17:25 PM	PH3 valve closed
2/12/2011	5:17:25 PM	SiCl4 pre valve closed
2/12/2011	5:17:25 PM	SiCl4 post valve closed
2/12/2011	5:17:25 PM	Main Vac valve closed
2/12/2011	5:17:25 PM	Bypass valve closed
2/12/2011	5:17:25 PM	Helium valve opened
2/12/2011	5:17:25 PM	Bubbler valve opened
2/12/2011	5:17:25 PM	Helium MFC set to  500.000000
2/12/2011	5:17:25 PM	H2 MFC set to  0.000000
2/12/2011	5:17:25 PM	BCl3 MFC set to  0.000000
2/12/2011	5:17:25 PM	PHl3 MFC set to  0.000000
2/12/2011	5:17:25 PM	SiCl4 MFC set to  0.000000
2/12/2011	5:17:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	5:17:25 PM	Tube furnace set to 0
2/12/2011	5:37:25 PM	Helium valve closed
2/12/2011	5:37:25 PM	H2 valve closed
2/12/2011	5:37:25 PM	BCl3 valve closed
2/12/2011	5:37:25 PM	PH3 valve closed
2/12/2011	5:37:25 PM	SiCl4 pre valve closed
2/12/2011	5:37:25 PM	SiCl4 post valve closed
2/12/2011	5:37:25 PM	Main Vac valve closed
2/12/2011	5:37:25 PM	Bypass valve closed
2/12/2011	5:37:25 PM	Bubbler valve closed
2/12/2011	5:37:25 PM	Helium MFC set to  0.000000
2/12/2011	5:37:25 PM	H2 MFC set to  0.000000
2/12/2011	5:37:25 PM	BCl3 MFC set to  0.000000
2/12/2011	5:37:25 PM	PHl3 MFC set to  0.000000
2/12/2011	5:37:25 PM	SiCl4 MFC set to  0.000000
2/12/2011	5:37:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	5:37:25 PM	Tube furnace set to 0
2/12/2011	5:37:25 PM	Run finished at 5:37 PM
2/12/2011	6:34:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2011	6:34:45 PM	Recipe started at 6:34 PM
2/12/2011	6:34:45 PM	Helium valve closed
2/12/2011	6:34:45 PM	H2 valve closed
2/12/2011	6:34:45 PM	BCl3 valve closed
2/12/2011	6:34:45 PM	PH3 valve closed
2/12/2011	6:34:45 PM	SiCl4 pre valve closed
2/12/2011	6:34:45 PM	SiCl4 post valve closed
2/12/2011	6:34:45 PM	Main Vac valve closed
2/12/2011	6:34:45 PM	Bubbler valve closed
2/12/2011	6:34:45 PM	Bypass valve opened
2/12/2011	6:34:45 PM	Helium MFC set to  0.000000
2/12/2011	6:34:45 PM	H2 MFC set to  0.000000
2/12/2011	6:34:45 PM	BCl3 MFC set to  0.000000
2/12/2011	6:34:45 PM	PHl3 MFC set to  0.000000
2/12/2011	6:34:45 PM	SiCl4 MFC set to  0.000000
2/12/2011	6:34:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	6:34:45 PM	Tube furnace set to 0
2/12/2011	6:35:14 PM	Helium valve closed
2/12/2011	6:35:14 PM	H2 valve closed
2/12/2011	6:35:14 PM	BCl3 valve closed
2/12/2011	6:35:14 PM	PH3 valve closed
2/12/2011	6:35:14 PM	SiCl4 pre valve closed
2/12/2011	6:35:14 PM	SiCl4 post valve closed
2/12/2011	6:35:14 PM	Bubbler valve closed
2/12/2011	6:35:14 PM	Main Vac valve opened
2/12/2011	6:35:14 PM	Bypass valve opened
2/12/2011	6:35:14 PM	Helium MFC set to  0.000000
2/12/2011	6:35:14 PM	H2 MFC set to  0.000000
2/12/2011	6:35:14 PM	BCl3 MFC set to  0.000000
2/12/2011	6:35:14 PM	PHl3 MFC set to  0.000000
2/12/2011	6:35:14 PM	SiCl4 MFC set to  0.000000
2/12/2011	6:35:14 PM	Bypass solenoid MFC set to  0.000000
2/12/2011	6:35:14 PM	Tube furnace set to 0
2/12/2011	6:35:14 PM	Run finished at 6:35 PM
2/12/2011	6:35:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
